JPH04219B2 - - Google Patents

Info

Publication number
JPH04219B2
JPH04219B2 JP58017380A JP1738083A JPH04219B2 JP H04219 B2 JPH04219 B2 JP H04219B2 JP 58017380 A JP58017380 A JP 58017380A JP 1738083 A JP1738083 A JP 1738083A JP H04219 B2 JPH04219 B2 JP H04219B2
Authority
JP
Japan
Prior art keywords
layer
gas
gas detection
substrate
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58017380A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59143945A (ja
Inventor
Junji Manaka
Hidekazu Oota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Seiki Co Ltd
Ricoh Co Ltd
Original Assignee
Ricoh Seiki Co Ltd
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Seiki Co Ltd, Ricoh Co Ltd filed Critical Ricoh Seiki Co Ltd
Priority to JP1738083A priority Critical patent/JPS59143945A/ja
Publication of JPS59143945A publication Critical patent/JPS59143945A/ja
Publication of JPH04219B2 publication Critical patent/JPH04219B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP1738083A 1983-02-07 1983-02-07 ガス検出装置 Granted JPS59143945A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1738083A JPS59143945A (ja) 1983-02-07 1983-02-07 ガス検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1738083A JPS59143945A (ja) 1983-02-07 1983-02-07 ガス検出装置

Publications (2)

Publication Number Publication Date
JPS59143945A JPS59143945A (ja) 1984-08-17
JPH04219B2 true JPH04219B2 (en]) 1992-01-06

Family

ID=11942397

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1738083A Granted JPS59143945A (ja) 1983-02-07 1983-02-07 ガス検出装置

Country Status (1)

Country Link
JP (1) JPS59143945A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4706493A (en) * 1985-12-13 1987-11-17 General Motors Corporation Semiconductor gas sensor having thermally isolated site

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2221811A1 (de) * 1972-05-04 1973-11-22 Bayer Ag Verfahren zur herstellung von flammfesten urethangruppen aufweisenden schaumstoffen
JPS5374495A (en) * 1976-12-14 1978-07-01 Marukon Denshi Kk Gas responsive element
JPS5521090U (en]) * 1978-07-31 1980-02-09
JPS5618752A (en) * 1979-07-25 1981-02-21 Ricoh Co Ltd Driving method for sensor
JPS5618750A (en) * 1979-07-25 1981-02-21 Ricoh Co Ltd Gas detector
JPS56109047U (en]) * 1980-01-23 1981-08-24
DE3019387C2 (de) * 1980-05-21 1986-01-23 Siemens AG, 1000 Berlin und 8000 München Dünnschicht-Halbleiter-Gassensor mit einem in den Sensoraufbau integrierten Heizelement
JPS5723849A (en) * 1980-07-18 1982-02-08 Matsushita Electric Ind Co Ltd Gas detector and its manufacture
JPS5794641A (en) * 1980-12-04 1982-06-12 Ricoh Co Ltd Manufacture of electric heater
JPS58103654A (ja) * 1981-12-16 1983-06-20 Matsushita Electric Ind Co Ltd 多機能ガスセンサ

Also Published As

Publication number Publication date
JPS59143945A (ja) 1984-08-17

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